发明名称 |
Laser processing method and laser processing apparatus using ultra-short pulse laser |
摘要 |
A laser processing apparatus includes a laser generation apparatus for outputting an ultra-short pulse laser beam, a laser control apparatus for controlling the laser generation apparatus, an optical system, an optical system control apparatus for measuring the optical system, and a measurement apparatus for measuring the ultra-short pulse laser beam. The intensity of the largest noise component pulse in the ultra-short pulse laser beam is controlled to be 2.5% or less of the intensity of the primary pulse in the ultra-short pulse laser beam.
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申请公布号 |
US2005211748(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20050120091 |
申请日期 |
2005.05.02 |
申请人 |
MATSUSHITA ELECTRIC INDUSTIAL CO., LTD |
发明人 |
MIZUYAMA YOSUKE;TOYOFUKU YOSUKE;LIU XINBING;CHENG CHEN-HSIUNG |
分类号 |
B23K26/00;B23K26/06;B23K26/38;B41J2/16;H01S3/107;(IPC1-7):H01S3/098 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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