| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing carbon nanotubes oriented in a direction nearly perpendicular to a substrate surface, by which the diameter, the number of layers and number density of carbon nanotube can be controlled. SOLUTION: The method for manufacturing the carbon nanotubes comprises a substrate preparing step of preparing a substrate having two-dimensionally regularly arrayed openings in which a synthesis catalyst or its precursor has been supported, and a thermal decomposition step of supplying a gaseous carbon-containing compound to a surface of the substrate and thermally decomposing the gaseous carbon-containing compound. It is preferable that, in the thermal decomposition step, the gaseous carbon-containing compound is thermally decomposed at a state with a relatively negative bias voltage applied to the substrate or a substrate holder holding the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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