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发明名称
VERFAHREN ZUR BESCHICHTUNG VON KERAMIKEN MITTELS CCVD
摘要
申请公布号
DE60022191(D1)
申请公布日期
2005.09.29
申请号
DE20006022191
申请日期
2000.06.29
申请人
NGIMAT CO., ATLANTA
发明人
HUNT, TYE;MCENTYRE, ERIC;NEUMAN, ANDREW;VINSON, SCOTT
分类号
C03B29/08;C03C17/00;C03C17/245;C23C16/453;C23C16/46;C23C16/54;H05K3/12;H05K3/14;(IPC1-7):C23C16/453;C23C16/513
主分类号
C03B29/08
代理机构
代理人
主权项
地址
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