摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heating treatment apparatus which can prevent shortening of a part life of a heating mechanism even when the supply of electricity to a cooling fan mechanism and a cooling control part stops. <P>SOLUTION: The heating treatment apparatus is equipped with a heat source 88 which heats by the supply of power, the heating mechanism 89 for spreading supplying heat from the heat source 88 to a heating region 82 where a heating object is subjected to heating treatment, the cooling fan mechanism 96 for cooling the heating mechanism 89 by sucking open air from a suction opening 80a formed at an external cover 80, and the cooling control part for operating the cooling fan mechanism 96 at least for only a predetermined time after the supply of power to the heat source 88 is blocked. An opening 80b different from the suction opening 80a is formed at the external cover 80, so that heat from the heating mechanism 89 is released. <P>COPYRIGHT: (C)2005,JPO&NCIPI |