| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor laser apparatus capable of preventing the corrosion of a refrigerant flow passage of a heatsink and of stably cooling a semiconductor laser array for a long period. SOLUTION: The semiconductor laser apparatus 1 comprises a semiconductor laser stack 200, a chiller 20, insulating piping 50, and a refrigerant 40. The chiller 20 supplies the refrigerant 40 to the semiconductor laser stack 200. The refrigerant 40 comprises fluorocarbon. The insulating piping 50 is a flexible insulating pipe. The insulating piping 50 includes a conductor 52 disposed in the piping. The conductor 52 is mesh-shaped to cover the cross section of the flow passage of the insulating piping 50. The mesh-shaped conductor 52 is connected to a grounding wire 54 and grounded. The semiconductor laser stack 200 comprises semiconductor laser units 100a to 100c. The semiconductor laser units 100a to 100c include semiconductor laser arrays 2a to 2c, and the heatsinks 10a to 10c, respectively. COPYRIGHT: (C)2005,JPO&NCIPI |
