MANUFACTURING METHOD OF CONVEYING MEMBER WITH CLEANING FUNCTION, ITS MANUFACTURING DEVICE, AND THE CLEANING METHOD OF SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning member removing simply and certainly the foreign substance which has adhered in a processing device without contaminating the processing device at the time of conveying a conveying member in the processing device, by avoiding the contamination caused by particles, metal impurities or the like in the manufacturing of the conveying member with a cleaning function. SOLUTION: The manufacturing method of the conveying member with a cleaning function having a cleaning layer on the conveying member uses a device which carries in the conveying member and provides a cleaning layer thereon, and performs in advance a fluorine system resin coating treatment to the part brought into contact with the conveying member of this device. Especially, the device serves as a device which carries the conveying member and adheres a cleaning sheet having the cleaning layer on the member. COPYRIGHT: (C)2005,JPO&NCIPI