ORGANIC EL PANEL AND ITS FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To enable film thickness control for providing a desired thickness for a lower electrode while flattening a surface of the lower electrode used as a base of an organic layer. SOLUTION: The lower electrode 12 used as the base of the organic layer is so formed on a substrate 11 as to have a polished surface 12A obtained by polishing film formation layers 12a and 12b by film formation divided in multiple times. On the film formation layer 12a by the first film formation, the film formation layer 12b by second and successive film formation thicker than it is formed. The film formation layers 12a and 12b are polished to a thickness larger than a film thickness t2 by the second and successive film formation to form the polished surface 12A. COPYRIGHT: (C)2005,JPO&NCIPI