摘要 |
PROBLEM TO BE SOLVED: To provide an organic semiconductor thin film that reveals high mobility, and to provide a method of manufacturing the thin film and an organic semiconductor element having excellent electronic characteristics. SOLUTION: A laminate composed of 2,3,9,10-tetramethylpentacene powder is formed by spreading a dispersion prepared by dispersing the 2,3,9,10-tetramethylpentacene powder in chloroform on a silicon substrate and evaporating the chloroform. Then a thin film is formed by melting the 2,3,9,10-tetramethylpentacene powder on the surface of the silicon substrate, by heating the silicon substrate to a temperature higher than the melting point of the 2,3,9,10-tetramethylpentacene. COPYRIGHT: (C)2005,JPO&NCIPI
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