发明名称 ORGANIC SEMICONDUCTOR THIN FILM, ITS MANUFACTURING METHOD, AND ORGANIC SEMICONDUCTOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an organic semiconductor thin film that reveals high mobility, and to provide a method of manufacturing the thin film and an organic semiconductor element having excellent electronic characteristics. SOLUTION: A laminate composed of 2,3,9,10-tetramethylpentacene powder is formed by spreading a dispersion prepared by dispersing the 2,3,9,10-tetramethylpentacene powder in chloroform on a silicon substrate and evaporating the chloroform. Then a thin film is formed by melting the 2,3,9,10-tetramethylpentacene powder on the surface of the silicon substrate, by heating the silicon substrate to a temperature higher than the melting point of the 2,3,9,10-tetramethylpentacene. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005268450(A) 申请公布日期 2005.09.29
申请号 JP20040077030 申请日期 2004.03.17
申请人 ASAHI KASEI CORP 发明人 NATSUME MINORU
分类号 H01L21/208;H01L29/786;H01L29/861;H01L51/00;H01L51/05;(IPC1-7):H01L51/00 主分类号 H01L21/208
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