发明名称 |
Long range corrections in integrated circuit layout designs |
摘要 |
A method and apparatus for compensating for flare intensity variations across an integrated circuit. A layout description for a physical layer of an integrated circuit or portion thereof is divided into a number of regions such as adjacent tiles. An estimate of the flare intensity in each region is determined. The flare intensity values calculated are divided into a number of ranges. In one embodiment, a data layer in a layout description is defined for each range of flare values computed. Features to be printed in an area having a flare value in a particular range are associated with a corresponding additional data layer. The features associated with each additional data layer are analyzed with a resolution enhancement technique that is selected or adjusted to compensate for differing flare values occurring in the integrated circuit.
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申请公布号 |
US2005216878(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20050066597 |
申请日期 |
2005.02.24 |
申请人 |
WORD JAMES;COBB NICOLAS B;GRANIK YURI |
发明人 |
WORD JAMES;COBB NICOLAS B.;GRANIK YURI |
分类号 |
G03F1/00;G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/00 |
代理机构 |
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