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发明名称
Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben
摘要
申请公布号
DE10353767(B4)
申请公布日期
2005.09.29
申请号
DE2003153767
申请日期
2003.11.17
申请人
INFINEON TECHNOLOGIES AG
发明人
FRANOSCH, MARTIN;MECKES, ANDREAS;OPPERMANN, KLAUS-GUENTER
分类号
B81B7/00;(IPC1-7):B81B7/00;B81C1/00
主分类号
B81B7/00
代理机构
代理人
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