发明名称 |
Adjustable exhaust flow for thermal uniformity |
摘要 |
A method and apparatus for adjusting exhaust flow, and the apparatus has a programmable exhaust control regulator generating a first input signal to a motor control circuit, an exhaust flow meter generating a second input signal to the motor control circuit and a motor driven control valve moved to different positions according to the first and second input signals, the control valve being installed in an exhaust portion of the hot plate apparatus.
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申请公布号 |
US2005211695(A1) |
申请公布日期 |
2005.09.29 |
申请号 |
US20040810978 |
申请日期 |
2004.03.26 |
申请人 |
KAO YAO-HWAN;LEE JIA-SHENG;LU DE-YUAN;CHEN MING-FA |
发明人 |
KAO YAO-HWAN;LEE JIA-SHENG;LU DE-YUAN;CHEN MING-FA |
分类号 |
F27B17/00;F27D11/00;F27D19/00;H01L21/00;(IPC1-7):F27D11/00 |
主分类号 |
F27B17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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