| 摘要 |
An electrostatic motor includes a stator electrode member ( 1 a) and a slider electrode member ( 1 b). The stator electrode member ( 1 a) and the slider electrode member ( 1 b) are provided with drive electrode patterns ( 2 ), and the drive electrode patterns are covered by cover films ( 4 ). Surfaces of the stator electrode member ( 1 a) and the slider electrode member ( 1 b) contacting each other are provided with a plurality of minute projections ( 5 ). A clearance between the stator electrode member and the slider electrode member is maintained by the contact of the projections. The projections ( 5 ) may also be provided on only one of the stator electrode member ( 1 a) and the slider electrode member ( 1 b), with the other electrode member having a flat surface.
|
