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发明名称
TEST HEAD FOR SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
KR20050094684(A)
申请公布日期
2005.09.28
申请号
KR20040020114
申请日期
2004.03.24
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM;KIM, YOUNG JONG
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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