发明名称 METHOD FOR THE OPTICAL CHARACTERIZATION OF MATERIALS WITHOUT USING A PHYSICAL MODEL
摘要 A method of optical characterization of a layer of material in which the spectrum of index n* (lambda) is characterized by a limited number of "nodes" that are points with coordinates (lambda<SUB>i</SUB>, n<SUB>i</SUB>, k<SUB>i</SUB>) or (lambda<SUB>i</SUB>, n*<SUB>i</SUB>), with n<SUB>i</SUB>=n(lambda<SUB>i</SUB>), k<SUB>i</SUB>=k(lambda<SUB>i</SUB>) and n*<SUB>i</SUB>=n<SUB>i</SUB>+jk<SUB>i</SUB>, where j<SUP>2</SUP> =-1 , and an interpolation law between the "nodes," which can be, for example, linear, cubic, of "spline" type or polynomial (of any given degree). This interpolation law allows the calculation, from the "nodes," of the refraction indexes and the extinction coefficients for the wavelengths located between the "nodes."
申请公布号 EP1579197(A2) 申请公布日期 2005.09.28
申请号 EP20030810019 申请日期 2003.12.24
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 HAZART, JEROME
分类号 G01N21/21 主分类号 G01N21/21
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