发明名称 Stacked gate region of a memory cell in a memory device
摘要 Semiconductor devices are disclosed utilizing at least one polysilicon structure in a stacked gate region according to the present invention. The stacked gate region includes a substrate, at least one trench, an oxide layer, at least one floating gate layer and the at least one polysilicon structure. The at least one polysilicon structure is formed adjacent to vertical edges of the at least one floating gate layer and above the oxide layer. The polysilicon structure, which includes polysilicon wings and ears, is used to increase the capacitive coupling of memory cells in memory devices, thereby allowing for further reduction or scaling in the size of memory cells and devices.
申请公布号 US6949792(B2) 申请公布日期 2005.09.27
申请号 US20040852312 申请日期 2004.05.24
申请人 MICRON TECHNOLOGY, INC. 发明人 HURLEY KELLY T.;WOLSTENHOLME GRAHAM
分类号 H01L21/8247;H01L27/115;(IPC1-7):H01L29/788 主分类号 H01L21/8247
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