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发明名称
A method of forming a parylene polymer layer and a multi-level structure comprising a parylene polymer layer
摘要
申请公布号
KR100517008(B1)
申请公布日期
2005.09.27
申请号
KR19997003622
申请日期
1999.04.24
申请人
发明人
分类号
B05D7/24;C08J7/16;B05D3/14;B32B27/00;C08G61/10;C23C14/12;H01L21/312;(IPC1-7):B05D7/24
主分类号
B05D7/24
代理机构
代理人
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地址
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