FLUID BEARING, STAGE APPARATUS, EXPOSURE DEVICE, EVALUATION DEVICE, AND EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a fluid bearing capable of developing a specified performance by suppressing the occurrence of vibration.

SOLUTION: This fluid bearing 10 comprises a fluid blowout port 11 formed in a pad surface 10A and a flow passage 20 connected to the fluid blowout port 11. The area of the flow passage 20 near the fluid blowout port 11 is formed to be gradually diverged toward the fluid blowout port 11.

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