Monitoring the deposition properties of an oled

摘要

A method for making an OLED device includes providing a substrate having one or more test regions and one or more device regions, moving the substrate into a least one deposition chamber for deposition of at least one organic layer, and depositing the at least one organic layer through a shadowmask selectively onto the at least one device region and at least one test region on the substrate. The method also includes measuring a property of the at least one organic layer in the at least one test region, and adjusting the deposition process in accordance with the measured property.