LINEAR MOTOR DRIVING STAGE, MANUFACTURING APPARATUS FOR FUNCTIONAL THIN FILM USING IT AND Z-AXIS LINEAR MOTOR

摘要

PROBLEM TO BE SOLVED: To provide a linear motor driving stage capable of realizing high speed movement and high accuracy positioning, a functional thin film manufacturing apparatus using it and a Z-axis linear motor having a lock mechanism at a low cost. SOLUTION: The linear motor driving stage has a lower axis linear motor driving stage and an upper axis linear motor driving stage. The lower axis linear motor driving stage is provided with a lower base; an X-axis linear motor placed on the lower base; and a lower Y-axis linear motor placed on the X-axis linear motor. The upper axis linear motor driving stage is provided with a strut erected on the lower base; an upper base placed on the strut; an upper Y-axis linear motor arranged on the upper base; and a Z-axis linear motor arranged on a movable element of the upper Y-axis linear motor. COPYRIGHT: (C)2005,JPO&NCIPI