发明名称 |
METHOD OF EVALUATING OF A SCANNING ELECTRON MICROSCOPE FOR PRECISE MEASUREMENTS |
摘要 |
A method evaluating a measuring electron microscope, comprising the steps of setting such modes of operation of a microscope, that will be used for subsequent measurements of sizes and line edge roughness; introducing a test-object which has a known straight edge into a chamber of objects of the microscope; orienting the test object on a stage of the microscope; scanning the test object with an electron beam; obtaining an image of the edge of the test object and saving the image in a digital form; localizing the edge of the test object and saving the image in a digital form; localizing the edge of the test object on the image on each line of scanning; producing storing a set of values of a coordinate X(i) which correspond to a position of the edge of an i-th line of scanning; approximating the sets of values X(i) with a straight line; calculating deviations P(I) of coordinates X(i) from a straight line on each line of scanning; analyzing a set of values of the deviations Delta(i); calculating an Delta<SUB>ave </SUB>and a maximal deviation Delta<SUB>max </SUB>and if a maximum value of deviation Delta<SUB>max </SUB>exceeds an acceptable tolerance of measurement, making a conclusion whether or not the microscope can be used for measurements and whether or not an adjustment is needed.
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申请公布号 |
US2005205777(A1) |
申请公布日期 |
2005.09.22 |
申请号 |
US20040805632 |
申请日期 |
2004.03.22 |
申请人 |
YEREMIN DMITRIY;NIKITIN ARKADY |
发明人 |
YEREMIN DMITRIY;NIKITIN ARKADY |
分类号 |
G01B5/28;G01N23/225;G21K7/00;H02N2/02;(IPC1-7):G01N23/225 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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