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发明名称
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摘要
申请公布号
DE69831196(D1)
申请公布日期
2005.09.22
申请号
DE19986031196
申请日期
1998.06.22
申请人
CANON K.K., TOKIO/TOKYO
发明人
AKIIKE, MICHIHIRO
分类号
G02B7/04;H01L41/04;H02N2/00;(IPC1-7):G02B7/04;G03B13/34;H01L41/09;G02B7/10
主分类号
G02B7/04
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