发明名称 SILICON NITRIDE SINTERED COMPACT AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a silicon nitride sintered compact suitable for a substrate for module, a structural member, or the like, and a method for manufacturing the same. <P>SOLUTION: The silicon nitride sintered compact suitable for the substrate for module, the structural member, or the like, is manufactured by mixing a silicon nitride granule (granule A) having 0.6-0.8 MPa grain strength and 20-30 &mu;m average particle diameter with a silicon nitride granule (granule B) having 0.2-0.5 MPa grain strength and 70-90 &mu;m average particle diameter, forming the mixture into a silicon nitride pressed body having &ge;65% relative density by press-forming, and sintering it. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005255430(A) 申请公布日期 2005.09.22
申请号 JP20040066858 申请日期 2004.03.10
申请人 DENKI KAGAKU KOGYO KK 发明人 YANO SEIJI;NISHIMURA KOJI;FUKUDA MAKOTO;YOSHINO NOBUYUKI
分类号 C04B35/626;H01L23/15 主分类号 C04B35/626
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