摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon nitride sintered compact suitable for a substrate for module, a structural member, or the like, and a method for manufacturing the same. <P>SOLUTION: The silicon nitride sintered compact suitable for the substrate for module, the structural member, or the like, is manufactured by mixing a silicon nitride granule (granule A) having 0.6-0.8 MPa grain strength and 20-30 μm average particle diameter with a silicon nitride granule (granule B) having 0.2-0.5 MPa grain strength and 70-90 μm average particle diameter, forming the mixture into a silicon nitride pressed body having ≥65% relative density by press-forming, and sintering it. <P>COPYRIGHT: (C)2005,JPO&NCIPI |