HYDROGEN SEPARATION MEMBRANE AND ITS PREPARATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen separation membrane excellent in heat resistance and steam resistance. SOLUTION: In preparing the hydrogen separation membrane, silica is formed into a membrane by a chemical vapor deposition method so as to clog micropores of a porous substrate, by using a vaporized silica source and a gas mixture consisting of pure oxygen in an amount of at least 25 wt.% and an inert gas. The method for producing the hydrogen separation membrane is also provided. COPYRIGHT: (C)2005,JPO&NCIPI