| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid filling method and a liquid filling device accurately efficiently filling a container with liquid in simple constitution. SOLUTION: The liquid filling device is equipped with a connection part 210 connected to the container 209, a storing part 211, a decompression part 212, and an atmospheric opening part 213, and exhaust in the container and degassing in the liquid are simultaneously conducted by reducing the pressure in a state that the liquid is temporarily stored in the storing part 211, and by rotating the container 209, the connection part 210, and the storing part 211 by 90°with a rotating part 217, the liquid flows from the storing part 211 to the container 209 by gravity, and the residual liquid is also injected by atmospheric pressure opening. Since the constitution is simple by only one vacuum system, a fluid passage from the storing part 211 to the container 209 is shortest, and no extra valves are present midway, a fluctuation of the filling amounts is made minimum, and filling is quickened. COPYRIGHT: (C)2005,JPO&NCIPI |
