| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser exposure device which has a function of inputting/displaying a optical path diagram when an optical element is set and facilitates parameter setting and operation in the form of the optical diagram. <P>SOLUTION: The laser exposure device 3 is provided with an optical path diagram type GUI setting/determination part 2. In the optical path diagram type GUI setting/determination part 2, when an optical element controlling light quantity of irradiation light and its condition are set and an optical path is created, an optical element and its condition of a setting object of a laser control part 8 are selected in the optical path diagram while displaying the optical path diagram of irradiation light on a display device 1a as graphical user interface (GUI), and thus the selected optical element and its condition are set and it is determined whether the arrangement of the set optical element and its condition in the optical path diagram is appropriate or not when they are arranged in the diagram. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
