LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To prevent a disconnection of a transparent conductive thin film made of ITO film at a step part of a substrate. SOLUTION: A process of forming the transparent conductive film made of ITO film on a liquid crystal display device substrate having step-like parts such as contact holes comprises a step of forming a first ITO film in an amorphous state; a step of pattering-processing the first ITO film by using a photoresist mask pattern in photolithography; a step of crystallizing a first ITO film pattern by using a heating means and the like after removing the mask pattern; a step of forming a second ITO film on an entire face of the substrate including the first ITO film pattern in a condition to make at least a part of film be amorphous; and a step of patterning-processing the second ITO film to the same shape as that of the first ITO film pattern. The method forms the transparent conductive film through a process of etching the second ITO film by using a reagent containing oxalic acid. COPYRIGHT: (C)2005,JPO&NCIPI