| 摘要 |
PROBLEM TO BE SOLVED: To provide a precise temperature control device for an electrodeposition liquid suitable for a small component such as an electronic component, and to provide a temperature control method. SOLUTION: A circulation apparatus comprises: a single system of electrodeposition liquid piping for discharging an electrodeposition liquid from an electrodeposition tank; a branching part for branching the electrodeposition liquid piping into dual systems of electrodeposition liquid piping; a valve for controlling cooling and a heat exchanger for cooling arranged on the one branched electrodeposition liquid piping; a valve for controlling heating and a heat exchanger for heating arranged on the other branched electrodeposition liquid piping; electrodeposition liquid feed piping for making an electrodeposition liquid whose temperature is controlled by the heat exchanger for cooling to join with an electrodeposition liquid whose temperature is controlled by the heat exchanger for heating, and circulating the resultant electrodeposition liquid inside the electrodeposition tank; and a control part for controlling the opening/closing of the valve for controlling cooling and the opening/closing of the valve for controlling heating on the basis of the measured temperature with thermometers arranged inside the electrodeposition tank. COPYRIGHT: (C)2005,JPO&NCIPI
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