| 摘要 |
<p>An electrochemical cell is constructed with the use of a four-electrode system that comprises a probe 1, material to be worked 2, reference electrode 10 and outer electrode 11. Respective potentials of the probe 1 and material to be worked 2 are set to be at potentials that cause no electrochemical reaction to occur. Then, the Z-axial position of the probe 1 is controlled so that the tunnel current that flows between the probe 1 and the material to be worked 2 may be fixed. Then, while the probe 1 is being moved along a working line, the Z-axial position of the probe 1 is stored continuously in a memory device 8 whereby storage is performed of the irregularities configuration and inclinations of the material to be worked 2. When working is performed, the electrochemical cell is reconstructed in the form of a three-electrode system that comprises the probe 1, material to be worked 2, and reference electrode 10, whereby, the probe 1 is again moved along the working line while controlling the Z-axial position of the probe 1 to be kept at the stored position or a position that has been obtained by adding thereto a certain offset. Simultaneously, a voltage is applied between the probe 1 and the material to be worked 2 to thereby perform the working operation along the working line through an electrochemical reaction.</p> |
