发明名称 |
Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof |
摘要 |
Waveguides and methods of fabrication thereof are presented. A representative waveguide includes a waveguide core and a cladding layer, where the cladding layer surrounds the waveguide core. The waveguide core and cladding can be made of a host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, and the sacrificial material can be selectively decomposed in both the core and cladding layers to form a plurality of nano air-gaps.
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申请公布号 |
US6947651(B2) |
申请公布日期 |
2005.09.20 |
申请号 |
US20020142601 |
申请日期 |
2002.05.10 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
MULE' TONY;KOHL PAUL;MEINDL JAMES D.;PADOVANI AGNES;GAYLORD THOMAS K.;GLYTSIS ELIAS N.;ALLEN SUE ANN B. |
分类号 |
G02B6/12;G02B6/124;G02B6/13;G02B6/138;(IPC1-7):G02B6/02;G02B6/20 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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