发明名称 Method of making a nanoscale electronic device
摘要 The present invention relates to a method of making a nanoscale electronic device wherein said device comprises a gap between about 0.1 nm and about 100 nm between at least two conductors, semiconductors or the combination thereof. The method features complete assembly of electrical contacts before addition of a molecular component thereby preserving the integrity of the molecular electronic component and maintaining a well-formed gap. The gap produced is within the nanoscale regime, has uniform width and is further characterized by surfaces that are uniformly smooth.
申请公布号 US6946336(B2) 申请公布日期 2005.09.20
申请号 US20030436704 申请日期 2003.05.13
申请人 WILLIAM MARSH RICE UNIVERSITY 发明人 PANG HARRY F.;TOUR JAMES M.
分类号 B82B;H01L21/28;H01L21/336;H01L21/44;H01L21/8238;H01L51/00;(IPC1-7):H01L21/823 主分类号 B82B
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