发明名称 Birefringence measurement apparatus and method
摘要 A birefringence measurement apparatus includes a measurement part for measuring a birefringence azimuth and a birefringence amount of an object to first and second light having different wavelengths from each other, and a determination part for calculating at least one of a birefringence azimuth and a birefringence amount to third light different in wavelength from the first and second light based on the birefringence azimuth and birefringence amount of the object to the first and second light.
申请公布号 US6947140(B2) 申请公布日期 2005.09.20
申请号 US20030391912 申请日期 2003.03.19
申请人 CANON KABUSHIKI KAISHA 发明人 YABU SHUICHI
分类号 G01N21/23;G01J4/00;G01M11/00;G03F7/20;(IPC1-7):G01J4/00 主分类号 G01N21/23
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