发明名称 |
Distributed Bragg reflector and method of fabrication |
摘要 |
A distributed Bragg reflector and a method of fabricating the same incorporates a support for supporting the gaps against collapse. The method includes forming a plurality of alternating structure and sacrificial layers on a substrate. The structure and sacrificial layers are etched into at least one mesa protruding from the substrate. A support layer is formed on the at least one mesa leaving a portion of the structure and sacrificial layers exposed. At least a portion of at least one of the exposed sacrificial layers are etched from between the structure layers to form gaps between the structure layers.
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申请公布号 |
US6947217(B2) |
申请公布日期 |
2005.09.20 |
申请号 |
US20010022757 |
申请日期 |
2001.12.14 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
CORZINE SCOTT W.;TAN MICHAEL RENNE TY;LIN CHAO KUN;ZHU JINTIAN;LEARY MICHAEL H. |
分类号 |
H01S5/183;(IPC1-7):G02B1/10 |
主分类号 |
H01S5/183 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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