| 摘要 |
PROBLEM TO BE SOLVED: To improve dimensional inspection accuracy and reproducibility of a scanning electron microscope. SOLUTION: Various electron beams 12 with accelerating voltages impressed on an electron gun 11 from an accelerating voltage impressing means 13 changed are irradiated, each secondary electron emitted thereby from a sample 16 is detected by a secondary electron detecting means 19, each contrast is detected by a contrast detecting means 22 based on the secondary electron detected, and an optimum accelerating voltage at which the contrast gets the largest is determined based on each accelerating voltage and the contrast detected. Afterwards, the electron beams 12 accelerated by the optimally accelerated accelerating voltage is irradiated on the sample 16 to carry out dimensional measurement of an actual pattern. COPYRIGHT: (C)2005,JPO&NCIPI
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