| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration piezoelectric acceleration sensor capable of biaxial acceleration detection without being influenced by a temperature change by solving the problem wherein accurate acceleration detection is difficult owing to the temperature change, concerning the vibration piezoelectric acceleration sensor used for an air bag control system or the like. <P>SOLUTION: This sensor has a constitution wherein a pair of diaphragms 23 arranged oppositely on a straight line, a support 33 for holding the diaphragms 23 and a holding part 32 for holding the support 33 slidably in the linear direction are provided on a frame 31, and a pair of diaphragms 23 are arranged oppositely on a straight line, orthogonally to the pair of diaphragms 23, to thereby detect a biaxial acceleration in the x-y directions. Hereby, the diaphragms 23 are expanded and contracted by an acceleration propagated to the support 33 through the holding part 32 to thereby change a characteristic oscillation frequency, and thereby the acceleration is detected and the high rate of change of a resonance frequency can be acquired, and biaxial detection of the acceleration can be performed with high accuracy without being influenced by the temperature change. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
