| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL device of a structure that can be manufactured at a superior yield. SOLUTION: In an organic electroluminescent device 20, comprised of a cathode 24 composed of metal film, an organic electroluminescent layer 26, and an anode 28 composed of transparent conductive films which are formed in a sequential order on a substrate 22, it is so arranged that a protection layer 36 including an inorganic sulfide film is formed to be interposed between the anode and the organic electroluminescent layer. By this, giving damages to the electroluminescent layer that may be caused by the plasma or the like at the time of film-forming the anode is prevented by the protection layer 36, and the manufacturing at the superior yield is enabled. COPYRIGHT: (C)2005,JPO&NCIPI
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