| 发明名称 |
TREATMENT APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent suppress the deterioration of the throughput of a device, and to prevent an object to be treated from being contaminated with foreign matters. <P>SOLUTION: A treatment apparatus having a hand part 51 for gripping or supporting the object X to be treated and treating the object X in a treatment chamber 2 in which a prescribed degree of cleanness is kept has a removal chamber 3 and a removal means for removing the foreign matters stuck to the hand part 51. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2005245837(A) |
申请公布日期 |
2005.09.15 |
| 申请号 |
JP20040062384 |
申请日期 |
2004.03.05 |
| 申请人 |
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD |
发明人 |
TAKAHASHI RYOJI;SHIMIZU MASAKI;MIZUNO TOMOO;OSAWA NORIYOSHI |
| 分类号 |
B08B3/02;A61L2/18;B08B3/08 |
主分类号 |
B08B3/02 |
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