METHOD AND EQUIPMENT FOR PROCESSING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method of processing an article with a high density fluid for processing in a processing chamber while applying an ultrasonic wave during processing in order to maintain and improve an economical yield at the time of manufacturing a smaller and more complex microelectronics system. SOLUTION: An article processing method comprises the steps of: introducing and sealing the article in a sealable processing chamber 362, introducing a subcritical fluid in a pressure vessel 303 and isolating the pressure vessel 303, and heating the subcritical fluid with a constant volume and density to produce a high density fluid; moving at least one part of the high density fluid to the processing chamber according to differences of pressure and thereby pressurizing the processing chamber; introducing one or more kinds of processing agents in the processing chamber to provide the high density fluid for processing; introducing an ultrasonic wave energy in the processing chamber and contacting the article with the high density fluid for processing and thereby obtaining a used high density fluid for processing and a processed article; and separating the used high density fluid for processing from the processed article. COPYRIGHT: (C)2005,JPO&NCIPI