| 摘要 |
An alignment method of micro-alignment members includes a first step for moving a reticle, which is movably disposed between a first position and a second position, to face a first microscope in the first position, and for aligning a center of the reticle with an optical axis of the first microscope while observing the reticle by the first microscope, a second step for moving the reticle to the second position to face a second microscope in the second position, and for aligning the center of the reticle with an optical axis of the second microscope while observing the reticle by the second microscope, a third step for disposing a first micro-alignment member such that a center of the first micro-alignment member aligns with the optical axis of the second microscope, and a fourth step for disposing a second micro-alignment member instead of the reticle to face the first micro-alignment member.
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