发明名称 Process for creating metal-insulator-metal devices
摘要 A process is described for fabricating an active addressing component such as a metal-insulator-metal (MIM) device by creating surface relief levels to form trenches, and depositing a metal in the trenches. The metal is anodized to create a non-linear dielectric. A second metal is deposited in the trenches to create an electrical with the dielectric which a contact is provided, and transferring the MIM device to a substrate by adhesive transfer.
申请公布号 US2005202647(A1) 申请公布日期 2005.09.15
申请号 US20050122910 申请日期 2005.05.05
申请人 WENG JIAN-GANG;MARDILOVICH PETER;RUDIN JOHN C.;GEISOW ADRIAN 发明人 WENG JIAN-GANG;MARDILOVICH PETER;RUDIN JOHN C.;GEISOW ADRIAN
分类号 G02F1/1343;G02F1/1365;H01L21/00;H01L21/20;H01L45/00;(IPC1-7):H01L21/20 主分类号 G02F1/1343
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