METHOD AND APPARATUS FOR IMAGING USING CONTUNUOUS NON-RASTER PATTERNS

摘要

An apparatus for performing data collection within a device is disclosed. A device steers a scanning probe in a continuous, non-raster pattern across a specimen. Data is collected in response to interaction between the probe and the specimen to form a data set. Spiral scanning patterns without turnaround (10) regions are utilized in embodiments of the present invention, both with and without rounded corners in the scanning patterns.