发明名称 Method for manufacturing magnetic sensor, magnet array used in the method, and method for manufacturing the magnet array
摘要 A magnetic sensor (10) includes eight SAF-type GMR elements (11-14,21-24). Four of the GMR elements detect a magnetic field in the direction of the X-axis and are bridge-connected to thereby constitute an X-axis magnetic sensor. The other four GMR elements detect a magnetic field in the direction of the Y-axis and are bridge-connected to thereby constitute a Y-axis magnetic sensor. The magnetization of a pinned layer of each of the GMR elements is pinned in a fixed direction by means of a magnetic field that a permanent bar magnet inserted into a square portion of a yoke of a magnet array generates in the vicinity of a rectangular portion of the yoke. A magnetic field generated in the vicinity of a certain rectangular portion of the yoke differs in direction by 90 degrees from a magnetic field generated in the vicinity of a rectangular portion adjacent to the former rectangular portion.
申请公布号 EP1574870(A2) 申请公布日期 2005.09.14
申请号 EP20050004046 申请日期 2005.02.24
申请人 YAMAHA CORPORATION 发明人 OOHASHI, TOSHIYUKI;AISO, KOKICHI
分类号 H01L43/02;G01R33/09;H01L43/00;H01L43/08;H01L43/12;(IPC1-7):G01R33/09 主分类号 H01L43/02
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