发明名称 |
Method for manufacturing magnetic sensor, magnet array used in the method, and method for manufacturing the magnet array |
摘要 |
A magnetic sensor (10) includes eight SAF-type GMR elements (11-14,21-24). Four of the GMR elements detect a magnetic field in the direction of the X-axis and are bridge-connected to thereby constitute an X-axis magnetic sensor. The other four GMR elements detect a magnetic field in the direction of the Y-axis and are bridge-connected to thereby constitute a Y-axis magnetic sensor. The magnetization of a pinned layer of each of the GMR elements is pinned in a fixed direction by means of a magnetic field that a permanent bar magnet inserted into a square portion of a yoke of a magnet array generates in the vicinity of a rectangular portion of the yoke. A magnetic field generated in the vicinity of a certain rectangular portion of the yoke differs in direction by 90 degrees from a magnetic field generated in the vicinity of a rectangular portion adjacent to the former rectangular portion. |
申请公布号 |
EP1574870(A2) |
申请公布日期 |
2005.09.14 |
申请号 |
EP20050004046 |
申请日期 |
2005.02.24 |
申请人 |
YAMAHA CORPORATION |
发明人 |
OOHASHI, TOSHIYUKI;AISO, KOKICHI |
分类号 |
H01L43/02;G01R33/09;H01L43/00;H01L43/08;H01L43/12;(IPC1-7):G01R33/09 |
主分类号 |
H01L43/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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