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发明名称
摘要
申请公布号	JP3694669(B2)	申请公布日期	2005.09.14
申请号	JP20010386908	申请日期	2001.12.20
申请人		发明人
分类号	G21K5/04;G03F7/20;H01J37/147;H01J37/21;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):H01L21/027	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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