Interferometer and position measuring device,申请号GB20020024804-传众专利搜索

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发明名称	Interferometer and position measuring device
摘要
申请公布号	GB2386417(B)	申请公布日期	2005.09.14
申请号	GB20020024804	申请日期	2002.10.24
申请人	* CANON KABUSHIKI KAISHA	发明人	SHIGEKI * KATO
分类号	G01B9/02;(IPC1-7):G01B9/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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