发明名称 Wavelength extension for backthinned silicon image arrays
摘要 There is described a back thinned sensor in which a material is added on the front surface to extend the wavelength of the sensor into wavelengths it normally does not reach. In the preferred embodiment, the back-thinned layer comprises silicon and is the base for a CMOS device or a CCD. The photocathode in a night vision device comprises in the preferred unit GaAs.
申请公布号 US6943425(B2) 申请公布日期 2005.09.13
申请号 US20040764049 申请日期 2004.01.23
申请人 INTEVAC, INC. 发明人 COSTELLO KENNETH A
分类号 H01L21/00;H01L27/146;H01L27/148;H01L29/732;H01L31/00;H01L31/072;(IPC1-7):H01L31/00 主分类号 H01L21/00
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