| 摘要 |
A fluid control device, comprising a flow controller (13g) in a gas line (13), a pressure control system area (14) provided on the upstream side of the flow controller (13g) in the gas line (13), and an extension part (15) extending from the upstream side end of the gas line (13) in a direction orthogonal to the gas line (13), wherein supply sources of different types of processing gases A, B, and C are connected to the extension part (15).
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