发明名称 PROCEDE DE FABRICATION DE FILM CONDUCTEUR ANISOTROPE
摘要 The invention relates to a method for production of an anisotropic conductive film which contains a layer of electrically-insulating material and conductive inserts therethrough, said method comprising the following steps: a) forming at least one layer of material, having through-holes, on a substrate, said layer being called the perforated layer , and b) filling said through-holes to form conductive inserts. Said method also comprises producing a mask which at least partially covers a first end of said conductive inserts and etching the unmasked section of the end of said conductive inserts, in order to obtain conductive inserts with tapered ends. Said invention applies to the formation of components (chips, integrated circuits) with high interconnection density.
申请公布号 WO2005010926(A3) 申请公布日期 2005.09.09
申请号 WO2004FR50335 申请日期 2004.07.15
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;BRUN, JEAN;PUGET, CHRISTIANE 发明人 BRUN, JEAN;PUGET, CHRISTIANE
分类号 G03F7/00;H01L21/60;H01L21/68 主分类号 G03F7/00
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