Wafer Spin Chuck,申请号KR20030032949-传众专利搜索

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发明名称	Wafer Spin Chuck
摘要
申请公布号	KR100513276(B1)	申请公布日期	2005.09.09
申请号	KR20030032949	申请日期	2003.05.23
申请人		发明人
分类号	H01L21/304;H01L21/00;H01L21/687;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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