发明名称 |
MINIATURE FLUID-COOLED HEAT SINK WITH INTEGRAL HEATER |
摘要 |
A temperature control device that includes a miniature liquid-cooled heat sink with integral heater and sensing elements is used as part of a system to provide a controlled temperature surface to an electronic device, such as a semiconductor device, during the testing phase. The temperature control device includes an interface surface configured to provide a thermal path from the device to a device under test. One such device has a liquid-cooled heat sink comprising a first heat transfer portion in a first plane and a second heat transfer portion in a second plane. The first and second heat transfer portions establish a three-dimensional cross-flow of coolant within the heat sink structure. An alternate embodiment includes parallel fluid conduits, each having a three-dimensional microchannel structure that directs coolant flow in three dimensions within the fluid conduits. Coolant flows in opposite directions through adjacent fluid conduits, thus resulting in a three-dimensional crossflow within the heat sink structure. |
申请公布号 |
WO2005081947(A2) |
申请公布日期 |
2005.09.09 |
申请号 |
WO2005US05673 |
申请日期 |
2005.02.23 |
申请人 |
DELTA DESIGN, INC.;KABBANI, SAMER |
发明人 |
KABBANI, SAMER |
分类号 |
F25B29/00;F28F3/08;H01L23/473 |
主分类号 |
F25B29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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