| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer light irradiation device having a large area at a low cost in which such spots will not occur where electric discharge is not generated due to unevenness in dielectrics to cover electrodes. SOLUTION: This is the excimer light irradiation device, in which excimer light generation gas is sealed into an electric discharge container which is hermetically sealed and provided with a light translucent part, and in the inside of the discharge container, a plurality of electrode structures are placed in parallel, in which unit electrodes composed of electrodes of flat plate state covered with the dielectrics are fitted in the longitudinal direction, the excimer light is irradiated from the light translucent part by impressing high frequency electric voltages between the unit electrode structures of different polarities, the electrode structures are arranged separated from each other, while the longitudinal direction of the individual electrodes are made to have the same polarity, the polarities between the separated but neighboring electrode structures are made to be different, and furthermore the fitting positions of the unit electrodes inside the electrode structures are mutually deviated between the separated and neighboring electrode structures. COPYRIGHT: (C)2005,JPO&NCIPI
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