发明名称 SUPPORT MECHANISM FOR MULTICHANNEL SENSOR WHICH IS ROBUST AGAINST THERMAL EXTERNAL DISTURBANCE
摘要 PROBLEM TO BE SOLVED: To obtain a support mechanism for a displacement sensor such that uncertainty in the measurement result is minimized, when a measurement system in which the plurality displacement sensors having unknown temperature characteristics are combined is designed. SOLUTION: The support position for the displacement sensor is defined so that a neutral surface of an object to be measured is at approximately the center of the measurement range of the plurality of displacement sensors. A jig for supporting the mutual position/posture of these displacement sensors employs a material and a structure such that the effect of the thermal displacement due to the effect of temperature variation can be managed or negligible, and supports it at the displacement sensor support position. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005241317(A) 申请公布日期 2005.09.08
申请号 JP20040048935 申请日期 2004.02.25
申请人 MITSUTOYO CORP 发明人 ABE MAKOTO
分类号 G01B21/00;(IPC1-7):G01B21/00 主分类号 G01B21/00
代理机构 代理人
主权项
地址